• RecordNumber
    93079
  • Author

    Madou, Marc J

  • Title

    Fundamentals of microfabrication and nanotechnology

  • Author Statement
    Marc J. Madou. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
  • Edition
    3rd ed
  • Publication
    Boca Raton, FL : CRC Press
  • Publication Year
    c2012
  • Collation
    3 v. : ill. (some col.) ; 29 cm
  • Notes
    Includes bibliographical references and index , v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
  • Subject

    Microelectromechanical systems , Nanoelectromechanical systems , Microfluidics , Solid-state physics

  • ADDED ENTRIES
    TI
  • Main Class
    620.
  • Sub Class
    5
  • Cutter no
    M183f
  • Date
    2012
  • واردكننده اطلاعات
    ربابه صمدي علي نيا
    • Link To Document
    https://lib.ui.ac.ir/dl/search/default.aspx?Term=93079&Field=0&DTC=2