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RecordNumber
93079
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Author
Madou, Marc J
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Title
Fundamentals of microfabrication and nanotechnology
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Author Statement
Marc J. Madou. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
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Edition
3rd ed
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Publication
Boca Raton, FL : CRC Press
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Publication Year
c2012
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Collation
3 v. : ill. (some col.) ; 29 cm
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Notes
Includes bibliographical references and index , v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
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Subject
Microelectromechanical systems , Nanoelectromechanical systems , Microfluidics , Solid-state physics
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ADDED ENTRIES
TI
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Main Class
620.
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Sub Class
5
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Cutter no
M183f
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Date
2012
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واردكننده اطلاعات
ربابه صمدي علي نيا
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Link To Document :
