RecordNumber
92397
Title
MEMS and MOEMS technology and applications
Editor
P. Rai-Choudhury, editor
Publication
New Delhi:PHI learning
Publication Year
2009.
Collation
xi, 520 p. : ill., diagrs, tables.
Notes
Originally published: Bellingham, Wash.: SPIE optical engineering press, c2000.
Bibliography
Includes bibliographical references and index
Subject
Microelectromechanical systems. , Optoelectronic devices.
ADDED ENTRIES
AU Rai-Choudhury, P.
Main Class
621.
Sub Class
381
Cutter no
M626
واردكننده اطلاعات
شيرين السادات خليفه سلطاني