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RecordNumber
86604
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Author
Paik, Ungyu
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Title
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
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Author Statement
Ungyu Paik, Jea-Gun Park
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Publication
CRC Press/Taylor & Francis Group
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Publication Year
c2009
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Collation
xiii, 191 p., [14] p. of plates ill. (some col.) 25 cm
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Notes
Includes bibliographical references (p. 171-175) and index.
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Subject
Chemical mechanical planarization. , Nanoparticles. , Nanoelectronics.
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ADDED ENTRIES
Park, Jea-Gun ,
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Main Class
621.
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Sub Class
38152
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Cutter no
P142n
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واردكننده اطلاعات
ربابه صمدي علي نيا
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Link To Document :
