RecordNumber
86604
Author
Paik, Ungyu
Title
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
Author Statement
Ungyu Paik, Jea-Gun Park
Publication
CRC Press/Taylor & Francis Group
Publication Year
c2009
Collation
xiii, 191 p., [14] p. of plates ill. (some col.) 25 cm
Notes
Includes bibliographical references (p. 171-175) and index.
Subject
Chemical mechanical planarization. , Nanoparticles. , Nanoelectronics.
ADDED ENTRIES
Park, Jea-Gun ,
Main Class
621.
Sub Class
38152
Cutter no
P142n
واردكننده اطلاعات
ربابه صمدي علي نيا