RecordNumber
84679
Author
Paik, Ungyu
Title
Nanoparticle engineering for chemical-mechanical planarization: fabrication of next-generation nanodevices
Author Statement
Ungyu Paik , Jea- Gun Park
Publication
CRC
Publication Year
c2009
Collation
xiii, 191p.: ill. (some col.), diagrs, tables
Bibliography
Includes bibliographical refrences (p. 171- 175) and index
Subject
Chemical mechanical planarization , Nanoparticles , Nanoelectronics
ADDED ENTRIES
Park, Jea- Gun
Main Class
621
Sub Class
.38152
Cutter no
P142n
وارد كنندة اطلاعات
s.soltani^d2009/05/19 10:53:03