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RecordNumber
84679
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Author
Paik, Ungyu
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Title
Nanoparticle engineering for chemical-mechanical planarization: fabrication of next-generation nanodevices
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Author Statement
Ungyu Paik , Jea- Gun Park
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Publication
CRC
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Publication Year
c2009
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Collation
xiii, 191p.: ill. (some col.), diagrs, tables
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Bibliography
Includes bibliographical refrences (p. 171- 175) and index
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Subject
Chemical mechanical planarization , Nanoparticles , Nanoelectronics
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ADDED ENTRIES
Park, Jea- Gun
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Main Class
621
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Sub Class
.38152
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Cutter no
P142n
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وارد كنندة اطلاعات
s.soltani^d2009/05/19 10:53:03
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Link To Document :
