• RecordNumber
    83513
  • Author

    Wasa, Kiyotaka

  • Title

    Thin film materials technology : sputtering of compound materials

  • Author Statement
    by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi
  • Publication
    Springer
  • Publication Year
    c2004
  • Collation
    xiv, 531 p. : ill
  • Bibliography
    Includes Index and bibliographies
  • Subject

    Cathode sputtering (Plating process) , Thin films

  • ADDED ENTRIES
    Kitabatake, Makoto , Adachi, Hideaki
  • Main Class
    621
  • Sub Class
    .38152
  • Cutter no
    W312t
  • وارد كنندة اطلاعات
    fazel^d2008/10/22 13:18:25
    • Link To Document
    https://lib.ui.ac.ir/dl/search/default.aspx?Term=83513&Field=0&DTC=2