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RecordNumber
83513
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Author
Wasa, Kiyotaka
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Title
Thin film materials technology : sputtering of compound materials
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Author Statement
by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi
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Publication
Springer
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Publication Year
c2004
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Collation
xiv, 531 p. : ill
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Bibliography
Includes Index and bibliographies
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Subject
Cathode sputtering (Plating process) , Thin films
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ADDED ENTRIES
Kitabatake, Makoto , Adachi, Hideaki
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Main Class
621
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Sub Class
.38152
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Cutter no
W312t
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وارد كنندة اطلاعات
fazel^d2008/10/22 13:18:25
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Link To Document :
