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RecordNumber
83335
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Author
Bowen, D. Keith
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Title
X- ray metrology in semiconductor manufacturing
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Author Statement
D. Keith Bowen , Brian K. Tanner
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Publication
CRC/ Taylor & Francis
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Publication Year
x2006
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Collation
279p.: ill, diagrs, tables
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Bibliography
Includes bibliographies
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Subject
Semiconductors- Design and construction- Quality control , Integrated circuits- Measurement , Semiconductor wafers- Inspection , X- rays- Diffraction , Fluoroscopy
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ADDED ENTRIES
Tanner, Brian K
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Main Class
621
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Sub Class
.38152
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Cutter no
B786x
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وارد كنندة اطلاعات
s.soltani^d2008/09/24 15:46:23 , fazel^d2008/10/22 14:08:17
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Link To Document :
