RecordNumber
83335
Author
Bowen, D. Keith
Title
X- ray metrology in semiconductor manufacturing
Author Statement
D. Keith Bowen , Brian K. Tanner
Publication
CRC/ Taylor & Francis
Publication Year
x2006
Collation
279p.: ill, diagrs, tables
Bibliography
Includes bibliographies
Subject
Semiconductors- Design and construction- Quality control , Integrated circuits- Measurement , Semiconductor wafers- Inspection , X- rays- Diffraction , Fluoroscopy
ADDED ENTRIES
Tanner, Brian K
Main Class
621
Sub Class
.38152
Cutter no
B786x
وارد كنندة اطلاعات
s.soltani^d2008/09/24 15:46:23 , fazel^d2008/10/22 14:08:17