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RecordNumber
82147
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Title
MEMS
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Editor
edited by Mohamed Gad-el-Hak
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Edition
2nd ed
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Publication
CRC/Taylor & Francis
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Publication Year
c2006
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Collation
3v. : ill (some col), diagrs, tables
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Series
Mechanical engineering series
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Bibliography
Includes bibliographies
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Contents
content: v.1. Introduction and fundamentals.- v.2. design and fabrication.- v.3. Applications
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Subject
Microelectromechanical systems- Design and construction , Microfabrication , Microelectronics , Nanotechnology , Detectors , Microactuators , Robots
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ADDED ENTRIES
Gad-el-Hak, Mohamed, 1945-, ed
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Main Class
621
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Sub Class
.381
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Cutter no
M626
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Date
2006
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وارد كنندة اطلاعات
fazel^d2008/01/09 13:01:32
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Link To Document :
