MEMS

Editor

edited by Mohamed Gad-el-Hak

Edition

2nd ed

Publication

CRC/Taylor & Francis

Publication Year

c2006

Collation

3v. : ill (some col), diagrs, tables

Series

Mechanical engineering series

Bibliography

Includes bibliographies

Contents

content: v.1. Introduction and fundamentals.- v.2. design and fabrication.- v.3. Applications

Subject

Microelectromechanical systems- Design and construction , Microfabrication , Microelectronics , Nanotechnology , Detectors , Microactuators , Robots

ADDED ENTRIES

Gad-el-Hak, Mohamed, 1945-, ed

Main Class

621

Sub Class

.381

Cutter no

M626

Date

2006

وارد كنندة اطلاعات

fazel^d2008/01/09 13:01:32

Link To Document