RecordNumber
79833
Title
Chemical physics of thin film deposition processes for micro- and nano- technologies
Editor
edited by Yves Pauleau
Publication
Dordrecht : Kluwer academic
Publication Year
c2002
Collation
xiii, 363p.: ill, diagrs, tables
Series
NATO science series. Series II, Mathematics, physics and chemistry; v. 55
Bibliography
Includes bibliographies
Subject
Thin films- Congresses , Nanotechnology- Congresses
ADDED ENTRIES
AU Pauleau, Yves, ed , SE ^dSeries: NATO science series. Series II, Mathematics, physics and chemistry; v. 55
Main Class
621
Sub Class
.38152
Cutter no
C517
وارد كنندة اطلاعات
fazel^d2007/04/24 16:33:51 , soltani^d2007/06/03 11:40:19