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RecordNumber
79833
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Title
Chemical physics of thin film deposition processes for micro- and nano- technologies
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Editor
edited by Yves Pauleau
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Publication
Dordrecht : Kluwer academic
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Publication Year
c2002
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Collation
xiii, 363p.: ill, diagrs, tables
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Series
NATO science series. Series II, Mathematics, physics and chemistry; v. 55
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Bibliography
Includes bibliographies
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Subject
Thin films- Congresses , Nanotechnology- Congresses
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ADDED ENTRIES
AU Pauleau, Yves, ed , SE ^dSeries: NATO science series. Series II, Mathematics, physics and chemistry; v. 55
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Main Class
621
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Sub Class
.38152
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Cutter no
C517
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وارد كنندة اطلاعات
fazel^d2007/04/24 16:33:51 , soltani^d2007/06/03 11:40:19
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Link To Document :
