• RecordNumber
    79792
  • Author

    Lange, Dirk, 1970-

  • Title

    CMOS cantilever sensor systems: atomic force microscopy and gas sensing applications

  • Author Statement
    D. Lange, O. Brand, H. Baltes
  • Publication
    Springer
  • Publication Year
    c2002
  • Collation
    viii, 142p.: ill, diagrs, tables
  • Series
    Microtechnology and mems
  • Bibliography
    Bibliography: p. [131]- 140
  • Subject

    Microelectromechanical systems- Design and construction , Metal oxide semiconductors, Complementary- Design and construction , Levers- Design and construction , Atomic force microscopy- Equipment and supplies- Design and construction , Gas detectors- Design and construction

  • ADDED ENTRIES
    Brand, Oliver, 1964-
  • Main Class
    681
  • Sub Class
    .413
  • Cutter no
    L274c
  • وارد كنندة اطلاعات
    fazel^d2007/04/24 12:57:36 , fazel^d2007/06/09 14:49:44
    • Link To Document
    https://lib.ui.ac.ir/dl/search/default.aspx?Term=79792&Field=0&DTC=2