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RecordNumber
79792
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Author
Lange, Dirk, 1970-
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Title
CMOS cantilever sensor systems: atomic force microscopy and gas sensing applications
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Author Statement
D. Lange, O. Brand, H. Baltes
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Publication
Springer
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Publication Year
c2002
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Collation
viii, 142p.: ill, diagrs, tables
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Series
Microtechnology and mems
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Bibliography
Bibliography: p. [131]- 140
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Subject
Microelectromechanical systems- Design and construction , Metal oxide semiconductors, Complementary- Design and construction , Levers- Design and construction , Atomic force microscopy- Equipment and supplies- Design and construction , Gas detectors- Design and construction
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ADDED ENTRIES
Brand, Oliver, 1964-
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Main Class
681
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Sub Class
.413
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Cutter no
L274c
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وارد كنندة اطلاعات
fazel^d2007/04/24 12:57:36 , fazel^d2007/06/09 14:49:44
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Link To Document :
