Micro process engineering : fundamentals, devices, fabrication, and applications

Editor

volume editor : Norbert Kockmann

Publication

Wiley

Publication Year

c2006

Collation

xxii, 507 p. : ill

Series

Advanced micro & nanosystems ; 5

Bibliography

Includes bibliographies

Subject

Production engineering , Microtechnology

ADDED ENTRIES

Kockmann, Norbert, ed

Main Class

670

Sub Class

.42

Cutter no

M626

وارد كنندة اطلاعات

zharfi^d2006/07/30 15:17:12

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