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RecordNumber
78416
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Title
Micro process engineering : fundamentals, devices, fabrication, and applications
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Editor
volume editor : Norbert Kockmann
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Publication
Wiley
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Publication Year
c2006
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Collation
xxii, 507 p. : ill
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Series
Advanced micro & nanosystems ; 5
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Bibliography
Includes bibliographies
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Subject
Production engineering , Microtechnology
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ADDED ENTRIES
Kockmann, Norbert, ed
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Main Class
670
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Sub Class
.42
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Cutter no
M626
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وارد كنندة اطلاعات
zharfi^d2006/07/30 15:17:12
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Link To Document :
