Introduction to microfabrication

RecordNumber
78160
Author
Franssila, Sami
Title
Introduction to microfabrication
Author Statement
Sami Franssila
Publication
Wiley
Publication Year
c2004
Collation
xvii, 401 p. : ill
Bibliography
Includes bibliographies
Subject
Microelectromechanical systems , Electronic apparatus and appliances , Microfabrication
Main Class
621
Sub Class
.3
Cutter no
F835i
وارد كنندة اطلاعات
zharfi^d2006/07/04 12:01:26
Link To Document :
https://lib.ui.ac.ir/dL/search/default.aspx?Term=78160&Field=0&DTC=2

Franssila, Sami