• RecordNumber
    73983
  • Author

    Varadan, V. K., 1943-

  • Title

    Microstereolithography and other fabrication techniques for 3D MEMS

  • Author Statement
    Vijay K. Varadan, Xiaoning Jiang, and Vasundara V. Varadan
  • Publication
    Wiley
  • Publication Year
    c2001
  • Collation
    xiii, 260 p. : ill
  • Bibliography
    Includes bibliographies
  • Subject

    Microelectromechanical systems-Design and construction , Microlithography , Three-dimensional display systems

  • ADDED ENTRIES
    Jiang, Xiaoning
  • Main Class
    621
  • Sub Class
    .381
  • Cutter no
    V287m
  • وارد كنندة اطلاعات
    zharfi^d2004/07/03 20:28:59