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RecordNumber
73471
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Title
Handbook of VLSI microlithography : principles, technology, and applications
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Editor
edited by John Helbert
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Edition
2nd ed
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Publication
Noyes
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Publication Year
c2001
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Collation
xxi, 1001p. : ill., diagrs, tables
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Bibliography
Includes bibliographies
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Subject
Integrated circuits-Very large scale integration , Microlithography
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ADDED ENTRIES
Helbert, John N., ed
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Main Class
621
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Sub Class
.381531
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Cutter no
H236
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Date
2001
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وارد كنندة اطلاعات
zharfi^d2004/06/02 09:23:58
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Link To Document :
