Handbook of VLSI microlithography : principles, technology, and applications

Editor

edited by John Helbert

Edition

2nd ed

Publication

Noyes

Publication Year

c2001

Collation

xxi, 1001p. : ill., diagrs, tables

Bibliography

Includes bibliographies

Subject

Integrated circuits-Very large scale integration , Microlithography

ADDED ENTRIES

Helbert, John N., ed

Main Class

621

Sub Class

.381531

Cutter no

H236

Date

2001

وارد كنندة اطلاعات

zharfi^d2004/06/02 09:23:58

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