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RecordNumber
69148
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Author
International conference on micro electro mechanical systems (13th : 2000 : Miyazaki)
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Title
Micro electro mechanical systems : MEMS 2000, proceedings, IEEE the thirteenth annual...
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Author Statement
sponsored by the IEEE robotics and automation society in cooperation with the micromachine center
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Publication
Institute of electrical and electronics engineers(IEEE)
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Publication Year
2000
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Collation
xlv, 810 p. : ill., diagrs, tables
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Subject
Microelectromechanical systems-Congresses
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Main Class
621
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Sub Class
.381
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Cutter no
I61m
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Date
2000
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وارد كنندة اطلاعات
zharfi^d2003/05/21 13:50:14
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Link To Document :
