RecordNumber
69148
Author
International conference on micro electro mechanical systems (13th : 2000 : Miyazaki)
Title
Micro electro mechanical systems : MEMS 2000, proceedings, IEEE the thirteenth annual...
Author Statement
sponsored by the IEEE robotics and automation society in cooperation with the micromachine center
Publication
Institute of electrical and electronics engineers(IEEE)
Publication Year
2000
Collation
xlv, 810 p. : ill., diagrs, tables
Subject
Microelectromechanical systems-Congresses
Main Class
621
Sub Class
.381
Cutter no
I61m
Date
2000
وارد كنندة اطلاعات
zharfi^d2003/05/21 13:50:14