RecordNumber
68129
Title
Handbook of advanced plasma processing techniques
Author Statement
R. J. Shul , S. J. Pearton (eds.)
Publication
Springer
Publication Year
c2000
Collation
xvi, 653p.: ill., diagrs, tables
Bibliography
Includes bibliographies
Subject
Plasma engineering , Electronic circuits , Integrated circuits- Design and construction , Plasma etching , Plasma spraying
ADDED ENTRIES
Shul, R. J
Main Class
621
Sub Class
.044
Cutter no
H236
وارد كنندة اطلاعات
s.hovsepian^d2003/01/27 13:51:49 , s.hovsepian^d2003/05/05 09:45:43 , faraz^d2003/05/05 15:35:50