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RecordNumber
68129
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Title
Handbook of advanced plasma processing techniques
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Author Statement
R. J. Shul , S. J. Pearton (eds.)
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Publication
Springer
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Publication Year
c2000
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Collation
xvi, 653p.: ill., diagrs, tables
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Bibliography
Includes bibliographies
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Subject
Plasma engineering , Electronic circuits , Integrated circuits- Design and construction , Plasma etching , Plasma spraying
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ADDED ENTRIES
Shul, R. J
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Main Class
621
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Sub Class
.044
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Cutter no
H236
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وارد كنندة اطلاعات
s.hovsepian^d2003/01/27 13:51:49 , s.hovsepian^d2003/05/05 09:45:43 , faraz^d2003/05/05 15:35:50
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Link To Document :
