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RecordNumber
48162
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Author
Stuart, R. V
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Title
Vacuum technology, thin Films and sputtering: an introduction
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Author Statement
R.V. Stuart
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Publication
Academic Press
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Publication Year
c1983
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Collation
vii, 151 p.: ill
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Subject
Vacuum technology , Thin films , Cathode sputtering (Plating process)
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Main Class
621
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Sub Class
.55
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Cutter no
S932v
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وارد كنندة اطلاعات
farazbakht 0723^d// , faraz^d2003/11/10 12:06:59 , norouzi^d2005/07/11 10:56:50
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Link To Document :