RecordNumber
48162
Author
Stuart, R. V
Title
Vacuum technology, thin Films and sputtering: an introduction
Author Statement
R.V. Stuart
Publication
Academic Press
Publication Year
c1983
Collation
vii, 151 p.: ill
Subject
Vacuum technology , Thin films , Cathode sputtering (Plating process)
Main Class
621
Sub Class
.55
Cutter no
S932v
وارد كنندة اطلاعات
farazbakht 0723^d// , faraz^d2003/11/10 12:06:59 , norouzi^d2005/07/11 10:56:50