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RecordNumber
44512
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Title
Sputtering by particle bombardment
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Author Statement
Edited by R. Behrisch
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Publication
Springer
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Publication Year
[c1983]
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Collation
...v.: ill, diagrs, tables
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Series
Topics in applied physics; v. 52
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Bibliography
Includes bibliographies
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Contents
v. 1. Physical sputtering of sing element solids.- v. 2. Sputtering of alloys and compounds electron and neutron sputtering surface topography
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Subject
Sputtering (physics) , Solids- Radition Effects , Surfaces
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ADDED ENTRIES
Behrisch, R., ed , ^cTitle: Particle Bombardment , ^dSeries: Topics in applied physics; v. 52
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Main Class
539
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Sub Class
.754
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Cutter no
S772
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وارد كنندة اطلاعات
^d// , faraz^d2003/09/22 15:19:11
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Link To Document :
