Sputtering by particle bombardment

Author Statement

Edited by R. Behrisch

Publication

Springer

Publication Year

[c1983]

Collation

...v.: ill, diagrs, tables

Series

Topics in applied physics; v. 52

Bibliography

Includes bibliographies

Contents

v. 1. Physical sputtering of sing element solids.- v. 2. Sputtering of alloys and compounds electron and neutron sputtering surface topography

Subject

Sputtering (physics) , Solids- Radition Effects , Surfaces

ADDED ENTRIES

Behrisch, R., ed , ^cTitle: Particle Bombardment , ^dSeries: Topics in applied physics; v. 52

Main Class

539

Sub Class

.754

Cutter no

S772

وارد كنندة اطلاعات

^d// , faraz^d2003/09/22 15:19:11

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