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RecordNumber
37259
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Title
Microelectronic processing; chemical Engineering Aspects
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Author Statement
Dennis W. Hess , Klavs F. Jensen
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Publication
American chemical society
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Publication Year
1989
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Collation
xiv, 547p
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Series
Advances in chemistry series, 221
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Subject
Microelectronics- Materials , Integrated circuits- Design and construction , Surface chemistry
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ADDED ENTRIES
Hess, Dennlsw , Jensen, Klavs F., 1952- , ^dSeries: Advances in chemistry series, 221
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Main Class
621
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Sub Class
.381
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Cutter no
M487
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وارد كنندة اطلاعات
farazbakht 0605^d// , norouzi^d2004/02/03 11:04:44
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Link To Document :
