RecordNumber
37259
Title
Microelectronic processing; chemical Engineering Aspects
Author Statement
Dennis W. Hess , Klavs F. Jensen
Publication
American chemical society
Publication Year
1989
Collation
xiv, 547p
Series
Advances in chemistry series, 221
Subject
Microelectronics- Materials , Integrated circuits- Design and construction , Surface chemistry
ADDED ENTRIES
Hess, Dennlsw , Jensen, Klavs F., 1952- , ^dSeries: Advances in chemistry series, 221
Main Class
621
Sub Class
.381
Cutter no
M487
وارد كنندة اطلاعات
farazbakht 0605^d// , norouzi^d2004/02/03 11:04:44