LPC VD Silicon nitride and oxynitride films; material and applications in integrated circuit Technology

Author Statement

F. H. P. M Habraken(ed)

Publication

Springer

Publication Year

[c1991]

Collation

x, 159 p.: ill, diagrs

Series

Research report Esprit project 369, v.1

Bibliography

Includes bibliographies

Subject

Integrated circuits- Passivation

ADDED ENTRIES

Habraken, F. H. P. M. ed , ^dSeries: Research report Esprit project 369 v.1

Main Class

621

Sub Class

.3815

Cutter no

L912

وارد كنندة اطلاعات

soltani^d//

Link To Document