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RecordNumber
32953
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Title
LPC VD Silicon nitride and oxynitride films; material and applications in integrated circuit Technology
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Author Statement
F. H. P. M Habraken(ed)
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Publication
Springer
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Publication Year
[c1991]
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Collation
x, 159 p.: ill, diagrs
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Series
Research report Esprit project 369, v.1
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Bibliography
Includes bibliographies
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Subject
Integrated circuits- Passivation
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ADDED ENTRIES
Habraken, F. H. P. M. ed , ^dSeries: Research report Esprit project 369 v.1
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Main Class
621
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Sub Class
.3815
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Cutter no
L912
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وارد كنندة اطلاعات
soltani^d//
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Link To Document :
