RecordNumber
31104
Author
Lieberman, Michael A.
Title
Principles of plasma discharges and materials processing
Author Statement
Michael A. Lieberman , Allan J. Lichtenberg
Publication
Willy
Publication Year
c1994
Collation
xxvi, 572 p.: diagrs, tables
Bibliography
Bibliography: p. 559- 564
Subject
Plasma dynamics , Thin films- Surfaces , Plasma etching , Plasma chemistry
ADDED ENTRIES
Lichtenberg, Allan J. jt. auth
Main Class
530
Sub Class
.44
Cutter no
L716p
وارد كنندة اطلاعات
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