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RecordNumber
31104
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Author
Lieberman, Michael A.
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Title
Principles of plasma discharges and materials processing
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Author Statement
Michael A. Lieberman , Allan J. Lichtenberg
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Publication
Willy
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Publication Year
c1994
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Collation
xxvi, 572 p.: diagrs, tables
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Bibliography
Bibliography: p. 559- 564
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Subject
Plasma dynamics , Thin films- Surfaces , Plasma etching , Plasma chemistry
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ADDED ENTRIES
Lichtenberg, Allan J. jt. auth
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Main Class
530
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Sub Class
.44
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Cutter no
L716p
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وارد كنندة اطلاعات
fazel^d//
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Link To Document :
