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RecordNumber
23324
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Author
Interantional conference on ion implantation equipment and techniques. 4th Berchtesgaden, 1982
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Title
Ion implantation equipment and techniques proceedings of...
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Editor
Editors H. Ryssel ¶ H. Glawischnig
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Publication
Springer
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Publication Year
1983
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Collation
x, 556p.: ill
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Series
Springer series in electrophysics; v.11
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Bibliography
Includes bibliographies
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Subject
Ion implaniation- Congresses
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ADDED ENTRIES
Ryssel, H. ed , ^dSeries:Springer series in electrophysics; v.11
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Main Class
530
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Sub Class
.41
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Cutter no
I61i
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Date
1982
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وارد كنندة اطلاعات
fazel^d// , fazel^d2003/09/09 09:58:54
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Link To Document :