• RecordNumber
    21802
  • Author

    Jaeger, Richard C.

  • Title

    Introduction to microelectronic fabrication

  • Author Statement
    by Richard C. Jaeger
  • Publication
    Addison-Wesley
  • Publication Year
    [c1988]
  • Collation
    v.: ill. diagrs. table
  • Series
    Modular series on solld state devises)
  • Bibliography
    Includes bibliographies
  • Subject

    Intergrated crituits-very large scale integration-Des and construction-congresses

  • Main Class
    621
  • Sub Class
    .395
  • Cutter no
    J22i
  • وارد كنندة اطلاعات
    bahrami 1118^d// , khodaei^d2003/10/01 10:34:13