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RecordNumber
892
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Author
Wasa, Kiyotaka
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Title
Thin film materials technology
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SubTitle
sputtering of compound materials
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Author Statement
by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi
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Publication
William Andrew Pub. ;Springer
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Publication Year
c2004
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Collation
xiv, 531 p. ill.
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Notes
Includes bibliographical references and index
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Subject
Cathode sputtering (Plating process) , Thin films
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ADDED ENTRIES
Kitabatake, Makoto. , Adachi, Hideaki.
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Main class
621.
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Sub class
38152
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Cutter no
W312t
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ISBN
0-8155-1483-2
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Link To Document :
