Thin film materials technology

SubTitle

sputtering of compound materials

Author Statement

by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi

Publication

William Andrew Pub. ;Springer

Publication Year

c2004

Collation

xiv, 531 p. ill.

Notes

Includes bibliographical references and index

Subject

Cathode sputtering (Plating process) , Thin films

ADDED ENTRIES

Kitabatake, Makoto. , Adachi, Hideaki.

Main class

621.

Sub class

38152

Cutter no

W312t

ISBN

0-8155-1483-2

Link To Document