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RecordNumber
722
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Author
Mattox, D. M.
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Title
Handbook of physical vapor deposition (PVD) processing
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SubTitle
film formation, adhesion, surface preparation and contamination control
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Author Statement
by Donald M. Mattox.
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Publication
Noyes Publications
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Publication Year
c1998
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Collation
945 p. ill.
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Notes
Includes bibliographical references and index
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Subject
Physical vapor deposition
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Main class
671.
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Sub class
735
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Cutter no
M444
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Date
1998
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ISBN
0-8155-1422-0
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Link To Document :
