RecordNumber

722

Author

Mattox, D. M.

Title

Handbook of physical vapor deposition (PVD) processing

SubTitle

film formation, adhesion, surface preparation and contamination control

Author Statement

by Donald M. Mattox.

Publication

Noyes Publications

Publication Year

c1998

Collation

945 p. ill.

Notes

Includes bibliographical references and index

Subject

Physical vapor deposition

Main class

671.

Sub class

735

Cutter no

M444

Date

1998

ISBN

0-8155-1422-0