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RecordNumber
539
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Author
Maluf, Nadim
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Title
An introduction to microelectromechanical systems engineering
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Author Statement
Nadim Maluf
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Edition
2nd ed
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Publication
Artech House
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Publication Year
c2004
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Collation
xx, 282 p. ill.
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Series
Microelectromechanical systems series
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Notes
Includes bibliographical references and index
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Subject
Microelectromechanical systems
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Main class
621.
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Sub class
381
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Cutter no
M261i
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Date
2004
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ISBN
1-58053-590-9
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Link To Document :
