• RecordNumber
    539
  • Author
    Maluf, Nadim
  • Title

    An introduction to microelectromechanical systems engineering

  • Author Statement
    Nadim Maluf
  • Edition
    2nd ed
  • Publication
    Artech House
  • Publication Year
    c2004
  • Collation
    xx, 282 p. ill.
  • Series
    Microelectromechanical systems series
  • Notes
    Includes bibliographical references and index
  • Subject

    Microelectromechanical systems

  • Main class
    621.
  • Sub class
    381
  • Cutter no
    M261i
  • Date
    2004
  • ISBN
    1-58053-590-9
    • Link To Document
    https://lib.ui.ac.ir/dl/search/default.aspx?Term=539&Field=0&DTC=14