Materials science in microelectronics

Author Statement

E.S. Machlin.

Edition

2nd ed

Publication

Elsevier

Publication Year

c2005

Collation

2 v.

Notes

content: v.1 The relationships between thin film processing and structure -- The effects . , Includes bibliographical references and index

Subject

Thin films. , Microelectronics.

Main class

535.

Sub class

Cutter no

M149m

Date

2005

ISBN

0080 44640 X

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