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RecordNumber
488
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Author
Machlin, E. S.
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Title
Materials science in microelectronics
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Author Statement
E.S. Machlin.
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Edition
2nd ed
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Publication
Elsevier
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Publication Year
c2005
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Collation
2 v.
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Notes
content: v.1 The relationships between thin film processing and structure -- The effects . , Includes bibliographical references and index
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Subject
Thin films. , Microelectronics.
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Main class
535.
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Sub class
5
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Cutter no
M149m
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Date
2005
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ISBN
0080 44640 X
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Link To Document :
