RecordNumber
4043
Title
Sputtering by particle bombardment
Author Statement
edited by R. Behrisch ; with contributions by H.H. Andersen ... [et al.].
Publication
Springer-Verlag
Publication Year
1981-c1991
Collation
3 v. ill.
Series
Topics in applied physics
Notes
Includes bibliographical references and indexes , 1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.
Subject
Sputtering (Physics) , Solids , Surfaces (Physics)
ADDED ENTRIES
Behrisch, Rainer. , Andersen, Hans Henrik.
Main class
530
Sub class
.41
Cutter no
Sp97
ISBN
0387105212