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RecordNumber
4043
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Title
Sputtering by particle bombardment
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Author Statement
edited by R. Behrisch ; with contributions by H.H. Andersen ... [et al.].
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Publication
Springer-Verlag
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Publication Year
1981-c1991
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Collation
3 v. ill.
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Series
Topics in applied physics
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Notes
Includes bibliographical references and indexes , 1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.
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Subject
Sputtering (Physics) , Solids , Surfaces (Physics)
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ADDED ENTRIES
Behrisch, Rainer. , Andersen, Hans Henrik.
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Main class
530
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Sub class
.41
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Cutter no
Sp97
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ISBN
0387105212
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Link To Document :
