RecordNumber
3248
Author
Santos, Hector J. de los.
Title
Principles and applications of NanoMEMS physics
Author Statement
by Hector J. De Los Santos.
Publication
Springer
Publication Year
c2005
Collation
xv, 254 p. ill.
Series
Microsystems
Notes
Includes bibliographical references (p. [241]-252) and index. , Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics
Subject
Quantum electronics. , Wave-particle duality. , Nanotechnology. , Microelectromechanical systems.
Main class
537
Sub class
.5
Cutter no
Sa596p
ISBN
1402032383