RecordNumber

2712

Author

Fujiwara, Hiroyuki

Title

Spectroscopic ellipsometry principles and applications

SubTitle

principles and applications

Author Statement

Hiroyuki Fujiwara

Publication

John Wiley & Sons

Publication Year

c2007

Collation

xviii, 369 p. ill.

Notes

Includes bibliographical references and index

Subject

Ellipsometry. , Spectrum analysis. , Materials

Main class

620

Sub class

.11295

Cutter no

F9556s

ISBN

0470016086