RecordNumber

2547

Author

Campbell, Stephen A.,1954-

Title

The science and engineering of microelectronic fabrication

Author Statement

Stephen A. Campbell.

Edition

2nd ed

Publication

Oxford University Press

Publication Year

2001

Collation

xiv, 603 p. ill.

Series

The Oxford series in electrical and computer engineering

Notes

Includes bibliographical references and index

Subject

Semiconductors

Main class

621

Sub class

.38152

Cutter no

C1521s

ISBN

0195136055