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RecordNumber
2547
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Author
Campbell, Stephen A.,1954-
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Title
The science and engineering of microelectronic fabrication
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Author Statement
Stephen A. Campbell.
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Edition
2nd ed
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Publication
Oxford University Press
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Publication Year
2001
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Collation
xiv, 603 p. ill.
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Series
The Oxford series in electrical and computer engineering
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Notes
Includes bibliographical references and index
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Subject
Semiconductors
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Main class
621
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Sub class
.38152
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Cutter no
C1521s
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ISBN
0195136055
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Link To Document :
