RecordNumber

1728

Author

Pierson, Hugh O

Title

Handbook of chemical vapor deposition (CVD)

SubTitle

principles, technology, and applications

Author Statement

by Hugh O. Pierson.

Edition

2nd ed.

Publication

Noyes Publications

Publication Year

c1999

Collation

xxiv, 506p. ill.

Notes

Includes bibliographical references and index

Subject

Vapor-plating --Handbooks, manuals, etc

Main class

671.

Sub class

735

Cutter no

P624h

ISBN

0-8155-1432-8