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RecordNumber
1529
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Title
Interlayer dielectrics for semiconductor technologies
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Author Statement
edited by S.P. Murarka, M. Eizenberg, A.K. Sinha.
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Publication
Elsevier/Academic Press
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Publication Year
c2003
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Collation
xiv, 444 p. ill.
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Notes
Includes bibliographical references (p.425-[427]) and index.
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Subject
Semiconductor wafers , Dielectrics
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ADDED ENTRIES
Murarka, S. P. , Eizenberg, M. , Sinha, A. K.
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Main class
621.
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Sub class
38152
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Cutter no
I611
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ISBN
0-12-511221-1
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Link To Document :
