Interlayer dielectrics for semiconductor technologies

Author Statement

edited by S.P. Murarka, M. Eizenberg, A.K. Sinha.

Publication

Elsevier/Academic Press

Publication Year

c2003

Collation

xiv, 444 p. ill.

Notes

Includes bibliographical references (p.425-[427]) and index.

Subject

Semiconductor wafers , Dielectrics

ADDED ENTRIES

Murarka, S. P. , Eizenberg, M. , Sinha, A. K.

Main class

621.

Sub class

38152

Cutter no

I611

ISBN

0-12-511221-1

Link To Document